Wi8 i G2 Wafer Vision Inspection Handler offers advanced solution for 2D surface defect inspections, measurements and multiple handling mechanisms to support different wafer forms including raw wafer, hoop ring, and framed wafer range from 100mm (4¡±) to 300mm (12¡±).
Model Type | Wi8 i G2 | ||
Wafer Input Type & Size | Raw Wafer - 6¡± (150mm) , 8¡± (200mm) , 12¡± (300mm)Framed Wafer - 6¡± (150mm) , 8¡± (200mm) , 12¡± (300mm)Hoop Ring - 4¡± (100mm) , 6¡± (150mm) , 8¡± (200mm)* | ||
Camera Lens | 1X2X5X | ||
Accuracy | 2.5 ¦Ìm / pixel1.25 ¦Ìm / pixel0.5 ¦Ìm / pixel | ||
Field of View | 12.8mm x 12.8mm6.4mm x 6.4mm2.5mm x 2.5mm | ||
System Capability | Offline Verifier Optimize production yield. Once wafer inspection is completed, user can identify, review and reclassify inspection result with Offline Verifier. Wafer Automated Loader-Unloader Auto handling supports up to 300mm (12¡±) raw wafer, hoop ring and framed wafer. |
*Only manual loading available | Specifications are subject to change.